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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
11780698
Filing Dt:
07/20/2007
Publication #:
Pub Dt:
03/27/2008
Inventors:
Jeremic J. Dalton, Martin Dauelsberg, Kenneth Doering, M. Ziaul Karim, Thomas E. Seidel et al
Title:
SMALL VOLUME SYMMETRIC FLOW SINGLE WAFER ALD APPARATUS
Assignment: 1
Reel/Frame:
020244/0624Recorded: 12/13/2007Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/25/2007
Exec Dt:
10/02/2007
Exec Dt:
10/23/2007
Exec Dt:
10/19/2007
Exec Dt:
10/16/2007
Exec Dt:
10/29/2007
Assignee:
KACKERSTR. 15-17
AACHEN, GERMAN DEMOCRATIC REPUBLIC 52072
Correspondent:
SONNENSCHEIN NATH & ROSENTHAL LLP
P.O. BOX 061080
WACKER DRIVE STATION, SEARS TOWER
CHICAGO, IL 60606-1080

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