Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11589476
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Filing Dt:
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10/30/2006
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Publication #:
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Pub Dt:
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05/01/2008
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Inventors:
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Richard Lewington, Michael N. Grimbergen, Khiem K. Nguyen, Darin Bivens et al
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Title:
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Plasma reactor for processing a transparent workpiece with backside process endpoint detection
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 450A |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIED MATERIALS |
P.O. BOX 450A |
SANTA CLARA, CA 95052 |
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