Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/12/2011
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Application #:
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11589426
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Filing Dt:
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10/30/2006
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Publication #:
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Pub Dt:
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05/01/2008
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Inventors:
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Madhavi R. Chandrachood, Michael N. Grimbergen, Khiem K. Nguyen, Richard Lewington et al
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Title:
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MASK ETCH PLASMA REACTOR WITH VARIABLE PROCESS GAS DISTRIBUTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| P.O. BOX 450A |
| PATENT COUNSEL |
| SANTA CLARA, CA 95052 |
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