Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/04/2012
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Application #:
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11638675
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Filing Dt:
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12/14/2006
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Publication #:
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Pub Dt:
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06/19/2008
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Inventors:
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Kars Zeger Troost, Jason Douglas Hintersteiner et al
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Title:
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LITHOGRAPHIC SYSTEM, DEVICE MANUFACTURING METHOD, SETPOINT DATA OPTIMIZATION METHOD, AND APPARATUS FOR PRODUCING OPTIMIZED SETPOINT DATA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL - 5504 DR VELDHOVEN, NETHERLANDS |
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| DE RUN 6501 |
| NL - 5504 DR VELDHOVEN, NETHERLANDS |
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| STERNE, KESSLER, GOLDSTEIN AND FOX, PLLC |
| 1100 NEW YORK AVE. NW |
| WASHINGTON, DC 20005 |
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