Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/29/2011
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Application #:
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11653441
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Filing Dt:
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01/16/2007
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Publication #:
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Pub Dt:
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07/17/2008
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Inventors:
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Hugo Augustinus Cramer, Antoine Gaston Marie Kiers, Durk Oeds Van Der Ploeg et al
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Title:
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INSPECTION METHOD AND APPARATUS,LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROCESSING CELL AND DEVICE MANUFACTURING METHOD
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501, NL-5504 DR |
VELDHOVEN, NETHERLANDS |
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PILLSBURY WINTHROP SHAW PITTMAN LLP |
P.O. BOX 10500 |
1650 TYSONS BOULEVARD |
MCLEAN, VA 22102 |
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