Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/17/2009
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Application #:
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12003377
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Filing Dt:
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12/21/2007
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Publication #:
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Pub Dt:
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07/31/2008
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Inventors:
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Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen et al
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Title:
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MARKER STRUCTURE FOR OPTICAL ALIGNMENT OF A SUBSTRATE, A SUBSTRATE INCLUDING SUCH A MARKER STRUCTURE, AN ALIGNMENT METHOD FOR ALIGNING TO SUCH A MARKER STRUCTURE, AND A LITHOGRAPHIC PROJECTION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 1110, NL-5503 LA |
| VELDHOVEN, NETHERLANDS |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| P.O. BOX 10500 |
| 1650 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP SHAW PITTMAN, LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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