Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/13/2010
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Application #:
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12019592
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Filing Dt:
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01/24/2008
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Publication #:
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Pub Dt:
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07/31/2008
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Inventors:
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Hidong Kwak, Shankar Krishnan
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Title:
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PURGE GAS FLOW CONTROL FOR HIGH-PRECISION FILM MEASUREMENTS USING ELLIPSOMETRY AND REFLECTOMETRY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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160 RIO ROBLES |
SAN JOSE, CALIFORNIA 95134 |
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JOSHUA D. ISENBERG |
809 CORPORATE WAY |
FREMONT, CA 94539 |
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