Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11981930
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Filing Dt:
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10/31/2007
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Publication #:
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Pub Dt:
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08/21/2008
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Inventors:
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David S. Mui, Wei Liu, Thorsten Lill, Yuxiang May Wang, Christopher Dennis Bencher
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Title:
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Etch pattern definition using a CVD organic layer as an anti-reflection coating and hardmask
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN, LLP |
| 595 SHREWSBURY AVENUE |
| SUITE 100 |
| SHREWSBURY, NJ 07702 |
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