Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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08/30/2011
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Application #:
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11951173
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Filing Dt:
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12/05/2007
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Publication #:
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Pub Dt:
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09/04/2008
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Inventors:
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Hong Xiao, Wei Fang, Jack Y. Jau
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Title:
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IN-LINE OVERLAY MEASUREMENT USING CHARGED PARTICLE BEAM SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5F, NO. 18, CREATION ROAD 1 |
| HSIN-CHU, TAIWAN 300 |
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| JOSEPH A. SAWYER, JR. |
| 2465 EAST BAYSHORE ROAD, #406 |
| PALO ALTO, CA 94303 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS 5504 DR |
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| FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER LLP |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, DC 20001 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS 5504 DR |
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| FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER LLP |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, DC 20001 |
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