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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/13/2012
Application #:
12076331
Filing Dt:
03/17/2008
Publication #:
Pub Dt:
09/25/2008
Inventors:
Yasufumi Nishii, Hiroyuki Nagasaka, Takeshi Okuyama
Title:
LIQUID RECOVERY SYSTEM, IMMERSION EXPOSURE APPARATUS, IMMERSION EXPOSING METHOD, AND DEVICE FABRICATING METHOD
Assignment: 1
Reel/Frame:
021036/0772Recorded: 06/03/2008Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/24/2008
Exec Dt:
04/25/2008
Exec Dt:
05/08/2008
Assignee:
2-3, MARUNOUCHI 3-CHOME
CHIYODA-KU, TOKYO, JAPAN
Correspondent:
MARIO A. COSTANTINO
OLIFF & BERRIDGE, PLC
P.O. BOX 320850
ALEXANDRIA, VA 22320-4850

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