Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/29/2012
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Application #:
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11798039
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Filing Dt:
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05/09/2007
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Publication #:
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Pub Dt:
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11/13/2008
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Inventors:
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Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer, Mircea Dusa, Irwan Dani Setija
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Title:
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INSPECTION METHOD AND APPARATUS, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROCESSING CELL AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501, NL-5504 DR |
| VELDHOVEN, NETHERLANDS |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| P.O. BOX 10500 |
| 1650 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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