Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12129074
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Filing Dt:
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05/29/2008
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Publication #:
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Pub Dt:
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12/18/2008
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Inventors:
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Hiroshi Tomita, Hiroyasu Iimori, Hiroaki Yamada, Minako Inukai
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Title:
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SEMICONDUCTOR SUBSTRATE CLEANING METHOD USING BUBBLE/CHEMICAL MIXED CLEANING LIQUID
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU, TOKYO 105-8001, JAPAN |
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| MR. ERNEST F. CHAPMAN |
| FINNEGAN, HENDERSON, FARABOW, GARRETT |
| & DUNNER, L.L.P. |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, D.C. 20001-4413 |
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