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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
12147034
Filing Dt:
06/26/2008
Publication #:
20090021726
Pub Dt:
01/22/2009
Inventors:
Ulrich Wegmann, Uwe Schellhorn, Joachim Stuehler, Albrecht Ehrmann, Martin Schriever et al
Title:
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM BY USING AN IMMERSION FLUID
Assignment: 1
Reel/Frame:
021634/0820Recorded: 10/06/2008Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
WEGMANN, ULRICH
Exec Dt:
09/08/2008
SCHELLHORN, UWE
Exec Dt:
09/09/2008
STUEHLER, JOACHIM
Exec Dt:
09/24/2008
EHRMANN, ALBRECHT
Exec Dt:
09/22/2008
SCHRIEVER, MARTIN
Exec Dt:
09/09/2008
GOEPPERT, MARKUS
Exec Dt:
09/10/2008
HAIDNER, HELMUT
Exec Dt:
09/09/2008
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
CHRIS C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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