Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12211023
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Filing Dt:
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09/15/2008
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Publication #:
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Pub Dt:
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03/26/2009
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Inventors:
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Hirohisa Hirayanagi, Kiyotaka Sakamoto, Tomoaki Osada, Yoshimitsu Kodaira
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Title:
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INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-5-1 KURIGI, ASAO-KU |
| KAWASAKI-SHI, KANAGAWA, JAPAN 215-8550 |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 30 ROCKERFELLER PLAZA |
| NEW YORK, NY 10112-3800 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO ADD TWO INVENTORS PREVIOUSLY OMITTED FROM A DOCUMENT RECORDED AT REEL 021538 FRAME 0127.
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| 2-5-1 KURIGI, ASAO-KU |
| KAWASAKI-SHI, KANAGAWA 215-8550, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NEW YORK 10112-3800 |
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