Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11933152
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Filing Dt:
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10/31/2007
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Publication #:
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Pub Dt:
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04/30/2009
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Inventors:
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Harald Herchen, Kim Vellore, Brian C. Lue
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Title:
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METHOD AND SYSTEM FOR PERFORMING ELECTROSTATIC CHUCK CLAMPING IN TRACK LITHOGRAPHY TOOLS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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K-I SHIJO BUILDING, 88 KANKOBOKO-CHO, SHIJODORI-MUROMACHI-HIGASHIIRU, SHIMOGYO-KU |
KYOTO, JAPAN 600-8009 |
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CRAIG C. LARGENT |
TOWNSEND AND TOWNSEND AND CREW LLP |
TWO EMBARCADERO CENTER, EIGHTH FLOOR |
SAN FRANCISCO, CA 94111-3834 |
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