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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
NONE
Issue Dt:
Application #:
12199308
Filing Dt:
08/27/2008
Publication #:
20090111056
Pub Dt:
04/30/2009
Inventors:
Rudolf Hendel, Zhilong Rao, Kuo-Shih Liu, Chris A. Mack, John S. Petersen, Shane Palmer
Title:
RESOLUTION ENHANCEMENT TECHNIQUES COMBINING FOUR BEAM INTERFERENCE-ASSISTED LITHOGRAPHY WITH OTHER PHOTOLITHOGRAPHY TECHNIQUES
Assignment: 1
Reel/Frame:
021449/0566Recorded: 08/27/2008Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
RAO, ZHILONG
Exec Dt:
08/27/2008
Assignee:
APPLIED MATERIALS, INC.
P.O. BOX 450A
LEGAL AFFAIRS DEPT.
SANTA CLARA, CALIFORNIA 95052
Correspondent:
ROBERT W. MULCAHY
P.O. BOX 450A
LEGAL AFFAIRS DEPT.
SANTA CLARA, CA 95052
Assignment: 2
Reel/Frame:
022125/0071Recorded: 01/20/2009Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
HENDEL, RUDOLF
Exec Dt:
09/16/2008
RAO, ZHILONG
Exec Dt:
01/12/2009
LIU, KUO-SHIH
Exec Dt:
09/16/2008
MACK, CHRIS A.
Exec Dt:
09/15/2008
PETERSEN, JOHN S.
Exec Dt:
12/19/2008
PALMER, SHANE
Exec Dt:
09/24/2008
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
JASON A. SANDERS
TWO EMBARCADERO CENTER, 8TH FLOOR
TOWNSEND AND TOWNSEND AND CREW LLP
SAN FRANCISCO, CA 94111-3834

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