Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/20/2012
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Application #:
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12260178
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Filing Dt:
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10/29/2008
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Publication #:
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Pub Dt:
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04/30/2009
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Inventor:
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Se Young Oh
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Title:
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APPARATUS FOR OPC AUTOMATION AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SAN 136-1, AMI-RI, BUBAL-EUP, GYEONGGI-DO |
ICHEON-SI, KOREA, REPUBLIC OF 467-701 |
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ANTHONY G. SITKO |
233 S. WACKER DRIVE, SUITE 6300 |
CHICAGO, IL 60606 |
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