Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12286465
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Filing Dt:
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09/30/2008
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Publication #:
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Pub Dt:
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05/21/2009
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Inventors:
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Katrin Pietsch, Klaus-Dieter Adam, Tillmann Ehrenberg
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Title:
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Apparatus and method for supporting a substrate at a position with high precision
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| KUBACHER WEG 4 |
| WEILBURG, GERMANY 35781 |
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| ANDREW E. MCLAUGHLIN, ESQ. |
| SIMPSON & SIMPSON, PLLC |
| 555 MAIN STREET |
| WILLIAMSVILLE, NY 14221-5406 |
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