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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
12129009
Filing Dt:
05/29/2008
Publication #:
20090151637
Pub Dt:
06/18/2009
Inventors:
CHIH-CHEN CHANG, TUNG-CHUAN WU, FU-CHING TUNG, MUH-WANG LIANG, CHING-HUEI WU et al
Title:
MICROWAVE-EXCITED PLASMA SOURCE USING RIDGED WAVE-GUIDE LINE-TYPE MICROWAVE PLASMA REACTOR
Assignment: 1
Reel/Frame:
021015/0290Recorded: 05/29/2008Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHANG, CHIH-CHEN
Exec Dt:
04/30/2008
WU, TUNG-CHUAN
Exec Dt:
05/02/2008
TUNG, FU-CHING
Exec Dt:
04/30/2008
LIANG, MUH-WANG
Exec Dt:
04/30/2008
WU, CHING-HUEI
Exec Dt:
04/30/2008
LO, CHAN-HSING
Exec Dt:
04/30/2008
SHEN, TEAN-MU
Exec Dt:
04/30/2008
CHIEN, JUNG-CHEN
Exec Dt:
04/30/2008
HO, JUNG-CHEN
Exec Dt:
04/30/2008
Assignee:
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
NO. 195, SEC.4, CHUNG-HSING RD., CHU-TUNG
HSINCHU, TAIWAN
Correspondent:
WPAT, PC
1940 DUKE ST., SUITE 200
ALEXANDRIA, VA 22314

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