Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11959005
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Filing Dt:
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12/18/2007
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Publication #:
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Pub Dt:
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06/18/2009
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Inventors:
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Yosuke TATSUZAKI, Ping-Wei CHANG
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Title:
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APPARATUS AND METHOD FOR ISOLATING VIBRATIONS IN A LITHOGRAPHY MACHINE USING TWO ACTIVE CONTROL UNITS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI, 3-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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| KNOBLE YOSHIDA & DUNLEAVY, LLC |
| 1628 JOHN F. KENNEDY BOULEVARD |
| EIGHT PENN CENTER |
| PHILADELPHIA, NJ 19103 |
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