Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/07/2010
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Application #:
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11956667
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Filing Dt:
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12/14/2007
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Publication #:
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Pub Dt:
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06/18/2009
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Inventor:
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Masafumi URAKAWA
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Title:
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METHOD AND SYSTEM FOR REDUCING LINE EDGE ROUGHNESS DURING PATTERN ETCHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-8481 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 4350 W. CHANDLER BLVD. |
| SUITE 10 |
| CHANDLER, AZ 85226 |
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