Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12334961
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Filing Dt:
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12/15/2008
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Publication #:
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Pub Dt:
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07/02/2009
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Inventors:
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Naoto Watanabe, Tadayoshi Yoshikawa
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Title:
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ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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80, OSHIMADA-MACHI |
NAGANO-SHI, NAGANO, JAPAN 381-2287 |
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RANKIN HILL AND CLARK LLP |
38210 GLENN AVENUE |
WILLOUGHBY, OH 44094 |
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