Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/27/2011
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Application #:
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12321102
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Filing Dt:
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01/15/2009
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Publication #:
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Pub Dt:
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07/16/2009
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Inventors:
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Ju-A Ryu, Jeong-Heung Kong, Yang-Koo Lee, Hun-Hwan Ha, Yo-Han Ahn, Hweon Jin, Myung-Ki Lee
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Title:
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SUBSTRATE TREATING APPARATUS AND EXPOSING APPARATUS FOR CLEANING A CHUCK CLEANING TOOL WITH TREATING BATH
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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416, MAETAN-DONG, YEONGTONG-GU |
SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF |
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MILLS & ONELLO LLP |
ELEVEN BEACON STREET |
SUITE 605 |
BOSTON, MA 02108 |
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