Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/08/2009
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Application #:
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12029710
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Filing Dt:
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02/12/2008
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Publication #:
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Pub Dt:
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08/13/2009
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Inventors:
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Deven M. Raj, Ludovic Godet, Bernard Lindsay, Timothy Miller, George D. Papasouliotis
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Title:
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CLOSED LOOP CONTROL AND PROCESS OPTIMIZATION IN PLASMA DOPING PROCESSES USING A TIME OF FLIGHT ION DETECTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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CHANGHOON CHOI, ESQ. |
35 DORY ROAD |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
GLOUCESTER, MA 01930 |
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