Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/07/2014
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Application #:
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12366198
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Filing Dt:
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02/05/2009
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Publication #:
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Pub Dt:
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08/13/2009
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Inventors:
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Taro Yamamoto, Naoto Yoshitaka, Shuichi Nishikido, Yoichi Tokunaga
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Title:
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CLEANING APPARATUS AND CLEANING METHOD, COATER/DEVELOPER AND COATING AND DEVELOPING METHOD, AND COMPUTER READABLE STORING MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-1, AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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OBLON, SPIVAK, ET AL. |
1940 DUKE STREET |
ALEXANDRIA, VA 22314 |
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