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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
12038158
Filing Dt:
02/27/2008
Publication #:
Pub Dt:
08/27/2009
Inventor:
Mitsunori Ohata
Title:
METHOD AND SYSTEM FOR PERFORMING MULTIPLE TREATMENTS IN A DUAL-CHAMBER BATCH PROCESSING SYSTEM
Assignment: 1
Reel/Frame:
021162/0309Recorded: 06/27/2008Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
06/27/2008
Assignee:
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME
MINATO-KU, TOKYO, JAPAN 107-6325
Correspondent:
TOKYO ELECTRON U.S. HOLDINGS, INC.
4350 W. CHANDLER BLVD.
SUITE 10
CHANDLER, AZ 85226

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