Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/13/2011
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Application #:
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12044959
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Filing Dt:
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03/08/2008
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Publication #:
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Pub Dt:
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09/10/2009
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Inventors:
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Sanjeev Kaushal, Sukesh Janubhai Patel, Kenji Sugishima
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Title:
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AUTONOMOUS ADAPTIVE SYSTEM AND METHOD FOR IMPROVING SEMICONDUCTOR MANUFACTURING QUALITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME |
| AKASAKA BIZ TOWER |
| TOKYO, JAPAN 107-6325 |
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| HIMANSHU S. AMIN |
| 1900 E. 9TH STREET |
| 24TH FLOOR |
| CLEVELAND, OH 44114 |
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