Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12218091
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Filing Dt:
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07/11/2008
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Publication #:
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Pub Dt:
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09/17/2009
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Inventor:
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Russell J. Holmes
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Title:
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LITHOGRAPHIC PROJECTION APPARATUS, GAS PURGING METHOD, DEVICE MANUFACTURING METHOD AND PURGE GAS SUPPLY SYSTEM
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Assignment:
1
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90 SO. 7TH STREET |
19TH FLOOR |
MINNEAPOLIS, MINNESOTA 55479 |
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SARAH WITHERS |
3290 NORTHSIDE PARKWAY |
SUITE 400 |
ATLANTA, GA 30327 |
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Assignment:
2
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RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).
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129 CONCORD ROAD |
BILLERICA, MASSACHUSETTS 01821-4600 |
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TIMOTHY J. KING |
129 CONCORD ROAD |
ENTEGRIS, INC. |
BILLERICA, MA 01821-4600 |
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