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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/13/2010
Application #:
12058594
Filing Dt:
03/28/2008
Publication #:
Pub Dt:
10/01/2009
Inventor:
Morgan D. EVANS
Title:
TECHNIQUES FOR IMPROVED UNIFORMITY TUNING IN AN ION IMPLANTER SYSTEM
Assignment: 1
Reel/Frame:
020722/0257Recorded: 03/28/2008Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
03/28/2008
Assignee:
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondent:
HUNTON & WILLIAMS LLP/VARIAN SEMICONDUCT
INTELLECTUAL PROPERTY DEPARTMENT
1900 K STREET, N.W., SUITE 1200
WASHINGTON, DC 20006-1109

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