Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12384171
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Filing Dt:
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03/31/2009
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Publication #:
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Pub Dt:
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10/08/2009
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Inventors:
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Robert P. Akins, Igor V. Fomenkov
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Title:
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System and methods for filtering out-of-band radiation in EUV exposure tools
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| LEGAL DEPT., MS/4-2D |
| SAN DIEGO, CALIFORNIA 92127 |
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| MATTHEW K. HILLMAN |
| 17075 THORNMINT COURT |
| LEGAL DEPT., MS/4-2D |
| SAN DIEGO, CA 92127 |
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