Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/26/2012
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Application #:
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12366934
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Filing Dt:
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02/06/2009
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Publication #:
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Pub Dt:
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10/22/2009
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Inventor:
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Susumu Makinouchi
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Title:
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POSITION MEASURING SYSTEM AND POSITION MEASURING METHOD, MOVABLE BODY APPARATUS, MOVABLE BODY DRIVE METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, PATTERN FORMING APPARATUS, AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| MARIO A. COSTANTINO |
| OLIFF & BERRIDGE, PLC |
| P.O. BOX 320850 |
| ALEXANDRIA, VA 22320-4850 |
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