Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12309202
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Filing Dt:
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01/09/2009
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Publication #:
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Pub Dt:
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12/24/2009
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Inventors:
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Bipin S. Parekh, Annie Xia, Joseph E. Smith, Michael Clarke
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Title:
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Apparatus and method for conditioning an immersion fluid
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3500 LYMAN BOULEVARD |
CHASKA, MINNESOTA 55318 |
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ALICE O. CARROLL |
530 VIRGINIA ROAD, P.O. BOX 9133 |
HAMILTON, BROOK, SMITH & REYNOLDS, P.C. |
CONCORD, MA 01742-9133 |
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Assignment:
2
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90 SO. 7TH STREET |
19TH FLOOR |
MINNEAPOLIS, MINNESOTA 55479 |
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SARAH WITHERS |
3290 NORTHSIDE PARKWAY |
SUITE 400 |
ATLANTA, GA 30327 |
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Assignment:
3
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RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).
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129 CONCORD ROAD |
BILLERICA, MASSACHUSETTS 01821-4600 |
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TIMOTHY J. KING |
129 CONCORD ROAD |
ENTEGRIS, INC. |
BILLERICA, MA 01821-4600 |
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