Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/26/2013
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Application #:
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12499612
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Filing Dt:
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07/08/2009
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Publication #:
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Pub Dt:
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02/11/2010
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Inventors:
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Patrick David Vogelsang, Martinus Cornelis Reijnen, Tom Van Zutphen
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Title:
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OPTICAL POSITION SENSOR, A POSITION SENSITIVE DETECTOR, A LITHOGRAPHIC APPARATUS AND A METHOD FOR DETERMINING AN ABSOLUTE POSITION OF A MOVABLE OBJECT TO BE USED IN A RELATIVE POSITION MEASUREMENT SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| 1650 TYSONS BOULEVARD |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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