Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/05/2011
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Application #:
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12190745
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Filing Dt:
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08/13/2008
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Publication #:
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Pub Dt:
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02/18/2010
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Inventors:
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Alois Nitsch, Rainer Tilgner, Horst Baumeister
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Title:
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METHOD AND APPARATUS FOR DETECTING A CRACK IN A SEMICONDUCTOR WAFER, AND A WAFER CHUCK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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AM CAMPEON 1-12 |
NEUBIBERG, GERMANY 85579 |
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SLATER & MATSIL, L.L.P. |
17950 PRESTON RD. |
SUITE 1000 |
DALLAS, TX 75252 |
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