Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/16/2013
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Application #:
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12199412
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Filing Dt:
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08/27/2008
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Publication #:
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Pub Dt:
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03/04/2010
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Inventors:
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Kousik Ganesan, Shanthinath Ghongadi, Tariq Majid, Aaron Labrie, Steven T. Mayer
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Title:
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APPARATUS AND METHOD FOR EDGE BEVEL REMOVAL OF COPPER FROM SILICON WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3970 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95134 |
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WEAVER AUSTIN VILLENEUVE & SAMPSON LLP |
PO BOX 70250 |
OAKLAND, CA 94612-0250 |
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