Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12211681
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Filing Dt:
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09/16/2008
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Publication #:
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Pub Dt:
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03/18/2010
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Inventors:
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Junjun Liu, Jacques Faguet, Eric M. Lee, Dorel I. Toma, Hongyu Yue
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Title:
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DIELECTRIC TREATMENT PLATFORM FOR DIELECTRIC FILM DEPOSITION AND CURING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 4350 W. CHANDLER BLVD. |
| SUITE 10 |
| CHANDLER, AZ 85226 |
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