Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/19/2013
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Application #:
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12566170
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Filing Dt:
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09/24/2009
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Publication #:
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Pub Dt:
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04/01/2010
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Inventors:
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Akira Endo, Shinji Nagai, Kouji Kakizaki, Osamu Wakabayashi, Yoshifumi Ueno
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Title:
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EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-6-1 OTEMACHI, CHIYODA-KU, |
| TOKYO, JAPAN 100-0004 |
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| WENDEROTH, LIND & PONACK, LLP |
| 1030 15TH STREET, N.W. |
| SUITE 400 EAST |
| WASHINGTON, DC 20005 |
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