Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12563526
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Filing Dt:
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09/21/2009
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Publication #:
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Pub Dt:
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04/22/2010
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Inventors:
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Manfred Oswald, Jivko Dinev, Jan Rupf, Markus Meye, Francesco Maletta, Uwe Leucke et al
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Title:
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ETCH REACTOR SUITABLE FOR ETCHING HIGH ASPECT RATIO FEATURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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PAULINE S. FISCHER |
APPLIED MATERIALS, INC. |
P.O. BOX 450 A |
SANTA CLARA, CA 95052 |
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