Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12552483
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Filing Dt:
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09/02/2009
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Publication #:
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Pub Dt:
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05/06/2010
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Inventors:
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Dieter Kraus, Dirk Heinrich Ehm, Theodoor Bastiaan Wolschrijn et al
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Title:
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APPARATUS AND METHOD FOR MEASURING THE OUTGASSING AND EUV LITHOGRAPHY APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| CORPORATE INTELLECTUAL PROPERTY DE RUN 6665 |
| VELDHOVEN, NETHERLANDS NL-5504 DT |
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| MELVIN C. GARNER |
| P.O. BOX 770 CHURCH STREET STATION |
| 01641/0212592-US0 |
| NEW YORK, NY 10008-0770 |
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Assignment:
2
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RE-RECORD TO CHANGE CORRESPONDENCE INFORMATION OF ASSIGNMENT, PREVIOUSLY RECORDED AT REEL/FRAME 023795/0843.
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| CORPORATE INTELLECTUAL PROPERTY DE RUN 6665 |
| VELDHOVEN, NETHERLANDS NL-5504 DT |
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| WALTER OTTESEN |
| PATENT ATTORNEY |
| P.O. BOX 4026 |
| GAITHERSBURG, MARYLAND 20885-4026 |
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Assignment:
3
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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