Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/01/2011
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Application #:
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12265242
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Filing Dt:
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11/05/2008
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Publication #:
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Pub Dt:
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05/06/2010
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Inventors:
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Gul Bahar Basim, Serkan Kincal, Eugene C. Davis
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Title:
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PREDICTIVE METHOD TO IMPROVE WITHIN WAFER CMP UNIFORMITY THROUGH OPTIMIZED PAD CONDITIONING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7839 CHURCHILL WAY |
| M/S 3999 |
| DALLAS, TEXAS 75251 |
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| TEXAS INSTRUMENTS INCORPORATED |
| P O BOX 655474, M/S 3999 |
| DALLAS, TX 75265 |
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