Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12600650
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Filing Dt:
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11/17/2009
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Publication #:
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Pub Dt:
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06/17/2010
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Inventors:
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Yutaka Kokaze, Masahisa Ueda, Mitsuhiro Endou, Toshiya Miyazaki, Genji Sakata et al
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Title:
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PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-INHIBITORY MEMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2500 HAGISONO |
| CHIGASAKI-SHI, JAPAN |
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| EDMUND P. PFLEGER |
| 55 SOUTH COMMERCIAL STREET |
| MANCHESTER, NH 03101 |
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