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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
04/23/2013
Application #:
12636928
Filing Dt:
12/14/2009
Publication #:
Pub Dt:
06/17/2010
Inventors:
Nobuyuki Masaki, Yuichi Sasuga, Masami Shibagaki, Hiroshi Doi
Title:
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE ANNEALING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
023895/0493Recorded: 02/04/2010Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/22/2010
Exec Dt:
01/22/2010
Exec Dt:
01/21/2010
Exec Dt:
01/20/2010
Assignees:
2-5-1 KURIGI, ASAO-KU
KAWASAKI-SHI, JAPAN 215-8550
2-5-1 KURIGI, ASAO-KU
KAWASAKI-SHI, JAPAN 215-8550
Correspondent:
PETER SAXON
1290 AVENUE OF THE AMERICAS
NEW YORK, NY 10104
Assignment: 2
Reel/Frame:
024264/0403Recorded: 04/21/2010Pages: 9
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/01/2010
Exec Dt:
02/01/2010
Assignee:
2-5-1 KURIGI, ASAO-KU
KAWASAKI-SHI, JAPAN 215-8550
Correspondent:
FITZPATRICK, CELLA, HARPER & SCINTO
1290 AVENUE OF THE AMERICAS
17TH FLOOR
NEW YORK, NY 10104

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