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Patent Assignment Abstract of Title
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Total Assignments: 3
Patent #:
NONE
Issue Dt:
Application #:
12594373
Filing Dt:
02/26/2010
Publication #:
20100153059
Pub Dt:
06/17/2010
Inventors:
Gerd Klose, Michael Arnz, Helmut Krause, Matthias Manger, Uwe Schellhorn et al
Title:
APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK
Assignment: 1
Reel/Frame:
023833/0656Recorded: 01/22/2010Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KLOSE, GERD
Exec Dt:
11/30/2009
ARNZ, MICHAEL
Exec Dt:
11/24/2009
HOF, ALBRECHT
Exec Dt:
11/30/2009
KRAUSE, HELMUT
Exec Dt:
11/30/2009
STOESSNER, ULRICH
Exec Dt:
11/03/2009
MANGER, MATTHIAS
Exec Dt:
11/24/2009
SCHELLHORN, UWE
Exec Dt:
11/30/2009
BECHSTEIN, KARL-HEINZ
Exec Dt:
11/17/2009
Assignee:
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10
JENA, GERMANY D-07745
Correspondent:
REX I. HUANG
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
023904/0539Recorded: 02/05/2010Pages: 8
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE INVENTOR'S NAME - ULRICH STROESSNER - INCORRECTLY RECORDED AS ULRICH STOESSNER PREVIOUSLY RECORDED ON REEL 023833 FRAME 0656. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Assignors:
KLOSE, GERD
Exec Dt:
11/30/2009
ARNZ, MICHAEL
Exec Dt:
11/24/2009
STROESSNER, ULRICH
Exec Dt:
11/03/2009
MANGER, MATTHIAS
Exec Dt:
11/24/2009
SCHELLHORN, UWE
Exec Dt:
11/30/2009
BECHSTEIN, KARL-HEINZ
Exec Dt:
11/17/2009
Assignee:
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10
JENA, GERMANY D-07445
Correspondent:
REX I. HUANG
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 3
Reel/Frame:
025104/0285Recorded: 10/07/2010Pages: 8
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE OMISSION OF INVENTOR HELMUT KRAUSE FROM THE NOTICE OF RECORDATION COVER SHEET FILED FEBRUARY 5, 2010 PREVIOUSLY RECORDED ON REEL 023904 FRAME 0539. ASSIGNOR(S) HEREBY CONFIRMS THE CONVEYANCE TO CARL ZEISS SMS GMBH AS SET FORTH IN THE ORIGINAL ASSIGNMENT DOCUMENT BEING RECORDED..
Assignors:
KLOSE, GERD
Exec Dt:
11/30/2009
ARNZ, MICHAEL
Exec Dt:
11/24/2009
HOF, ALBRECHT
Exec Dt:
11/30/2009
KRAUSE, HELMUT
Exec Dt:
11/30/2009
STROESSNER, ULRICH
Exec Dt:
11/03/2009
MANGER, MATTHIAS
Exec Dt:
11/24/2009
SCHELLHORN, UWE
Exec Dt:
11/30/2009
BECHSTEIN, KARL-HEINZ
Exec Dt:
11/17/2009
Assignee:
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10
D-07745 JENA, GERMANY
Correspondent:
MARC M. WEFERS
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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