Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/23/2010
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Application #:
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12718599
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Filing Dt:
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03/05/2010
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Publication #:
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Pub Dt:
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06/24/2010
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Inventors:
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Alexander Straaijer, Ronald Franciscus Herman Hugers
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Title:
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INSPECTION METHOD AND APPARATUS, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROCESSING CELL AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
VELDHOVEN, NETHERLANDS NL - 5504 DR |
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
1100 NEW YORK AVENUE, N.W. |
WASHINGTON, DC 20005 |
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