Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/13/2012
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Application #:
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12603000
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Filing Dt:
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12/03/2009
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Publication #:
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Pub Dt:
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07/08/2010
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Inventors:
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Walter Franken, Johannes K¿ppeler
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Title:
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DEVICE FOR THE TEMPERATURE CONTROL OF THE SURFACE TEMPERATURES OF SUBSTRATES IN A CVD REACTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1139 KARLSTAD DRIVE |
SUNNYVALE, CALIFORNIA 94089 |
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SONNENSCHEIN NATH & ROSENTHAL LLP |
POST OFFICE BOX 061080 |
WACKER DRIVE STATION, WILLIS TOWER |
CHICAGO, IL 60606 |
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