Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/29/2012
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Application #:
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12665173
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Filing Dt:
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12/17/2009
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Publication #:
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Pub Dt:
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07/08/2010
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Inventors:
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Seiichi Uchida, Hiroyuki Ogawa
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Title:
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PRODUCTION METHOD OF SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, AND EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 22-22, NAGAIKE-CHO, ABENO-KU |
| OSAKA-SHI, OSAKA, JAPAN 545-8522 |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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