Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/07/2013
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Application #:
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12638571
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Filing Dt:
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12/15/2009
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Publication #:
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Pub Dt:
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07/22/2010
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Inventors:
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Hiroshi Komori, Tatsuya Yanagida, Tamotsu Abe, Hideo Hoshino, Akira Endo, Kouji Kakizaki et al
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Title:
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EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-6-1 OTEMACHI, CHIYODA-KU |
| TOKYO, JAPAN 100-0004 |
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| WENDEROTH, LIND & PONACK, LLP |
| 1030 15TH STREET, NW |
| SUITE 400 EAST |
| WASHINGTON, DC 20005 |
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