Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/03/2016
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Application #:
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12598377
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Filing Dt:
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03/30/2010
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Publication #:
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Pub Dt:
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08/05/2010
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Inventors:
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Frank Staals, Joeri Lof, Erik Roelof Loopstra, Wim Tjibbo Tel, Bearrach Moest
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Title:
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LITHOGRAPHIC APPARATUS CONFIGURED TO RECONSTRUCT AN AERIAL PATTERN AND TO COMPARE THE RECONSTRUCTED AERIAL PATTERN WITH AN AERIAL PATTERN DETECTED BY AN IMAGE SENSOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL - 5504 DR |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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