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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/20/2011
Application #:
12371193
Filing Dt:
02/13/2009
Publication #:
Pub Dt:
08/19/2010
Inventors:
Michael A. Carcasi, David Dixon
Title:
MULTI-PITCH SCATTEROMETRY TARGETS
Assignment: 1
Reel/Frame:
022257/0245Recorded: 02/13/2009Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/09/2009
Exec Dt:
02/09/2009
Assignee:
AKASAKA BIZ TOWER
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
TOKYO ELECTRON U.S. HOLDINGS, INC.
4350 W. CHANDLER BLVD.
SUITE 10
CHANDLER, AZ 85226

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