Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12085675
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Filing Dt:
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07/06/2010
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Publication #:
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Pub Dt:
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10/28/2010
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Inventors:
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Masahiro Nakamura, Yuka Soma
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Title:
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METHOD FOR PURIFYING UNSATURATED FLUOROCARBON COMPOUND, METHOD FOR FORMING FLUOROCARBON FILM, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-2, MARUNOUCHI 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 1008246 |
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| EDWARDS ANGELL PALMER & DODGE LLP |
| P.O. BOX 55874 |
| BOSTON, MA 02205 |
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